JPH0136664B2 - - Google Patents
Info
- Publication number
- JPH0136664B2 JPH0136664B2 JP57163192A JP16319282A JPH0136664B2 JP H0136664 B2 JPH0136664 B2 JP H0136664B2 JP 57163192 A JP57163192 A JP 57163192A JP 16319282 A JP16319282 A JP 16319282A JP H0136664 B2 JPH0136664 B2 JP H0136664B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- emitter electrode
- ion beam
- emitter
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 25
- 239000000919 ceramic Substances 0.000 claims description 10
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 22
- 229910001338 liquidmetal Inorganic materials 0.000 description 14
- 230000005855 radiation Effects 0.000 description 8
- 238000005468 ion implantation Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000006023 eutectic alloy Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57163192A JPS5954156A (ja) | 1982-09-21 | 1982-09-21 | 電界放出型イオンビ−ム発生装置用電極構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57163192A JPS5954156A (ja) | 1982-09-21 | 1982-09-21 | 電界放出型イオンビ−ム発生装置用電極構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5954156A JPS5954156A (ja) | 1984-03-28 |
| JPH0136664B2 true JPH0136664B2 (en]) | 1989-08-01 |
Family
ID=15769012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57163192A Granted JPS5954156A (ja) | 1982-09-21 | 1982-09-21 | 電界放出型イオンビ−ム発生装置用電極構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5954156A (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69432899D1 (de) | 1994-10-07 | 2003-08-07 | Ibm | Flüssige ionische Zusammensetzungen verwendende Ionenpunktquellen hoher Luminosität |
| FR2918790A1 (fr) * | 2007-07-09 | 2009-01-16 | Orsay Physics Sa | Source micronique d'emission ionique |
| FR3100464B1 (fr) * | 2019-09-10 | 2023-05-05 | Centre Nat Rech Scient | Procede d’emission d’atomes, de molecules ou d’ions |
-
1982
- 1982-09-21 JP JP57163192A patent/JPS5954156A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5954156A (ja) | 1984-03-28 |
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